JPH0110933Y2 - - Google Patents
Info
- Publication number
- JPH0110933Y2 JPH0110933Y2 JP3051385U JP3051385U JPH0110933Y2 JP H0110933 Y2 JPH0110933 Y2 JP H0110933Y2 JP 3051385 U JP3051385 U JP 3051385U JP 3051385 U JP3051385 U JP 3051385U JP H0110933 Y2 JPH0110933 Y2 JP H0110933Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer
- handle
- center line
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 32
- 239000004065 semiconductor Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3051385U JPH0110933Y2 (en]) | 1985-03-04 | 1985-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3051385U JPH0110933Y2 (en]) | 1985-03-04 | 1985-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61146947U JPS61146947U (en]) | 1986-09-10 |
| JPH0110933Y2 true JPH0110933Y2 (en]) | 1989-03-29 |
Family
ID=30530278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3051385U Expired JPH0110933Y2 (en]) | 1985-03-04 | 1985-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0110933Y2 (en]) |
-
1985
- 1985-03-04 JP JP3051385U patent/JPH0110933Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61146947U (en]) | 1986-09-10 |
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